Ursprungsort
Beijing, China
Maßgeschneiderte unterstützung
OEM, ODM
Resolution
"3nm @30kV(SE) 4nm @30kV(BSE) 8nm @3kV(SE)"
Magnification
"1x~300,000x(film) 1x~1,000,000x(screen)"
Electron Gun
Pre-Aligned Tungsten Filament
Vacuum System
"Fully Auto Control Oil Free Vacuum <5x10-4 Pa"
Camera
"Vertical Optical Navigation CCD Horizontal Monitoring CCD"